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Company Description

Contact Info

Weizmann Science Park

PO Box 266

Rehovot, 7610201

Israel

Phone: 972 73 229 5600

Fax: 972 8 940 7776

Nova Measuring Instruments Ltd. engages in the design, development, and production of optical metrology solutions, such as integrated process control metrology systems, as well as stand-alone metrology used in the manufacturing process of semiconductors. The company supplies its metrology systems to major semiconductor manufacturers worldwide. Products The company’s products include metrology systems for thin film measurement in chemical mechanical polishing and chemical vapor deposition applications; optical CD and Metal Line Thickness (MLT) systems for use in post-copper chemical mechanical polishing applications and optical critical dimension systems for lithography and etch applications. The company’s integrated thickness monitoring system for chemical mechanical polishing process control enables wafer-to-wafer closed loop control. It offers several models of integrated thickness monitoring systems, depending on polisher type and end-user requirements. These metrology systems address a range of metrology requirements of its end-user and process equipment manufacturer customers. Both its integrated and stand-alone systems incorporate patented optical scanning, dynamic auto-focus, unique pattern recognition for arbitrarily oriented wafers and proprietary algorithms for in-water measuring of two layers simultaneously. Following is a summary of its products: Thin Film Process Control The NovaScan 2040 is the second generation of integrated thickness monitoring systems with enhanced spectral range, responding to the needs of the industry for emerging chemical mechanical polishing high-end applications of thin films and complex layer stacks. The NovaScan 2020Cu has the same basic platform as the NovaScan 2040, with additional hardware and software improvements, enabling the system to answer the unique requirements of copper chemical mechanical polishing monitoring. The system was introduced to the market at the beginning of 2003. The NovaScan 3090Next is its main product. Targeted at 45 nm and 32 nm technology nodes this tool was released in 2006 and provided significant improvements in throughput to tool matching and spectral range over the older NovaScan 3090. The NovaScan 3090Next is available as integrated metrology and as stand-alone metrology systems for both thin film and Optical CD (scatterometry) applications. The Nova T500 stand-alone product family, targeted at technology nodes ranging from 32nm and smaller than 20nm. The new generation Nova i500 integrated metrology features the same metrology as the Nova T500 for complete stand-alone to integrated metrology compatibility. The Nova i500 features advanced metrology for technology nodes smaller than 20nm and high throughput that meets the standards of next generation polishers. The Nova T600 is the latest addition to the stand-alone product family, targeted at technology nodes of 2x and beyond. The Nova T600 features multi-channel reflectometry configuration that is optimized for best sensitivity on small features and critical device parameters, such as measurement of high-aspect-ratio structures. The Nova V2600, announced on July 2012, enables chipmakers to accelerate the development and improve production yield of multi-chip integrations that rely on TSVs (Through Silicon Vias). The new Nova V2600 TSV Metrology system, developed in collaboration with device makers, allows measurement of TSV features, such as side-wall angle, bottom diameter, and bottom curvature. NovaMars is an advanced scatterometry modeling and application development software tool enabling complex 2D, 3D and in-die measurements. A closed loop control option for the NovaScan systems delivers highly automated wafer-to-wafer uniformity over chemical mechanical polishing manufacturing processes. The thickness data of every processed wafer is obtained and process parameters are fed back to adjust the next wafer polish. Nova Fleet Management is the company’s solution for managing large fleets of metrology tools and is designed to address the needs and working methodologies of Metrology and Process Engineers in the fab. NovaNet is a computer network, connecting all NovaScan systems on a factory floor. The NovaNet also includes a report generator (NSA) that allows the creation of reports from all the systems connected and allows programmable cross sections. NovaHPC (High Power Computer) supports the NovaMars Application Development Tool and enables effective and timely calculations of attained spectra. The stand-alone modular rack includes HPC, TurboHPC, Grid computing connectivity enabled, and Web-based management SW. Research and Development In 2012, the company’s research and development expenses, net of participation by the Office of the Chief Scientist of the Ministry of Industry, Trade and Labor, included $ 24.6 million. Intellectual Property As of February 15, 2013, the company’s portfolio includes approximately 100 U.S. patents and approximately 40 non-U.S. patents. The U.S. patents the company holds have expiration dates ranging from 2014 to 2025. It also has 21 U.S. patent applications pending and approximately 30 applications pending in other countries including 6 PCT applications. The company’s patents and applications principally cover various aspects of optical measurement systems and methods, integrated process control implementation concepts, and optical, opto-mechanical and mechanical design. The company also has registered 4 trademarks in the U.S. and 10 registered trademarks in countries other than the U.S. Sales and Marketing The company maintains sales, service or applications offices in Europe, Israel, Japan, Korea, Singapore, Taiwan, China and the U.S. Competition In the stand-alone metrology field, the company faces intense competition in, from both Nanometrics and KLA-Tencor. The company also competes against companies manufacturing other types of equipment, such as Hitachi hi-tech and Applied Materials in the area of CD-SEM and Rudolph Technologies in the area of acoustic measurement of copper lines. History Nova Measuring Instruments Ltd. was founded in 1993.

 

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